ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,459,056, issued on Nov. 4, was assigned to NIKON Corp. (Tokyo).
"Processing system" was invented by Shinji Sato (Fukaya, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A processing system, which processes an object by irradiating the object with a processing light through an irradiation optical system, includes: an irradiation apparatus including at least a terminal optical element of the irradiation optical system; a movement apparatus that moves the irradiation apparatus; a first measurement apparatus that is disposed at the irradiation apparatus and measures a position of the object; a second measurement apparatus that measures the position of t...