ALEXANDRIA, Va., July 3 -- United States Patent no. 12,345,517, issued on July 1, was assigned to NIKON Corp. (Tokyo).
"Measuring device, exposure device, and measurement method" was invented by Michio Ohashi (Tokyo) and Satoshi Takahashi (Kumagaya, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A measuring device includes an illumination system configured to radiate light to a measuring target object located on an object plane, an image formation system configured to form a conjugate plane optically conjugated with the object plane, a diffracted light restricting part configured to restrict at least some of a plurality of rays of diffracted light from the measuring target object and to pass a first di...