US Patent Issued to NIKON on Feb. 3 for "Processing apparatus, processing method and processing system" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,539,561, issued on Feb. 3, was assigned to NIKON Corp. (Tokyo).

"Processing apparatus, processing method and processing system" was invented by Masayuki Shiraishi (Kumagaya, Japan), Kenta Sudo (Yokohama, Japan), Yosuke Tatsuzaki (Kumagaya, Japan) and Baku Ogasawara (Kumagaya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing apparatus is a processing apparatus that irradiates a surface of an object with processing light to process an object and is provided with: a light irradiation apparatus that emits first processing light to form a first irradiation area on the surface and emits second processing light to form a second irradiation area...