US Patent Issued to NIKON on Dec. 9 for "Exposure apparatus, method for manufacturing device, method for manufacturing flat panel display, and exposure method" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,493,240, issued on Dec. 9, was assigned to NIKON Corp. (Tokyo).

"Exposure apparatus, method for manufacturing device, method for manufacturing flat panel display, and exposure method" was invented by Masaki Kato (Yokohama, Japan), Yasushi Mizuno (Saitama, Japan) and Hitoshi Mizuno (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An exposure apparatus that scans and exposes a substrate via an optical modulator in which a plurality of elements are controlled according to an image pattern, the exposure apparatus includes a first stage that supports a first substrate, a second stage that supports a second substrate different from the first sub...