ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,397,367, issued on Aug. 26, was assigned to NIKON Corp. (Tokyo).
"Processing system and processing method" was invented by Shigeki Egami (Tokyo) and Yosuke Tatsuzaki (Kumagaya, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A processing system has: an irradiation optical system irradiating an object with an energy beam from a light source; an object placing apparatus on which the object is placed; a light receiving apparatus that is disposed at the object placing apparatus and that optically receives the energy beam from the irradiation optical system; and a measurement apparatus that measures at least one of the light receiving apparatus and a pa...