US Patent Issued to NHK SPRING on Sept. 23 for "Apparatus and method for controlling a substrate temperature" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,421, issued on Sept. 23, was assigned to NHK SPRING Co. LTD. (Yokohama, Japan).

"Apparatus and method for controlling a substrate temperature" was invented by Naoya Kida (Yokohama, Japan), Arata Tatsumi (Yokohama, Japan), Kenji Sekiya (Yokohama, Japan), Naoya Aikawa (Yokohama, Japan) and Masaya Takanashi (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A stage includes a shaft, a first supporting plate over the shaft, a heater arranged in a trench formed in the first supporting plate, and a gas-supplying tube arranged in the shaft and configured to blow a gas to the first supporting plate. The first supporting plate may have a disk s...