US Patent Issued to NHK SPRING on July 8 for "Stage and manufacturing method thereof" (Japanese Inventors)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,354,901, issued on July 8, was assigned to NHK SPRING Co. LTD. (Yokohama, Japan).

"Stage and manufacturing method thereof" was invented by Hibiki Yokoyama (Yokohama, Japan), Naoya Kida (Yokohama, Japan), Jun Futakuchiya (Yokohama, Japan), Noriyoshi Kaneda (Yokohama, Japan) and Michiyoshi Sone (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A stage includes a base material including a step portion and an insulating film. The step portion includes a first surface recessed from a top surface of the base material and a second surface recessed from a side surface of the base material. The insulating film includes a plurality of first layers on...