ALEXANDRIA, Va., March 12 -- United States Patent no. 12,247,296, issued on March 11, was assigned to NHK Spring Co. Ltd. (Yokohama, Japan) and IZUMI TECHNO INC. (Okaya, Japan).
"Member for plasma processing device" was invented by Toshihiko Hanamachi (Kanagawa, Japan), Shuhei Morota (Kanagawa, Japan), Go Takahara (Kanagawa, Japan), Masaru Takimoto (Kanagawa, Japan), Hibiki Yokoyama (Kanagawa, Japan), Hiroshi Mitsuda (Kanagawa, Japan), Yoshihito Araki (Kanagawa, Japan) and Kengo Ajisawa (Nagano, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A member for a plasma processing device includes: an aluminum base material; and an oxide film formed on the aluminum base material and having a porous structure, ...