US Patent Issued to NGK INSULATORS on Oct. 21 for "Feeder member and wafer placement table" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,822, issued on Oct. 21, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Feeder member and wafer placement table" was invented by Taro Usami (Kasamatsu-Town, Japan), Seiya Inoue (Handa, Japan), Tatsuya Kuno (Nagoya, Japan) and Tomoyuki Minami (Handa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A feeder member is used to supply electricity to an electrode embedded in a ceramic base. The feeder member includes an electrode-side terminal that is made of a high-melting-point metal containing material and joined to the electrode, an intermediate member that is made of a Cu containing material and directly joined to the electrode-side termin...