ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,452,963, issued on Oct. 21, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).
"Ceramic heater" was invented by Tomohiro Hara (Handa, Japan) and Yutaka Unno (Handa, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A ceramic heater includes a disc-shaped ceramic plate having a wafer placement surface, and a shaft provided on a surface on an opposite side of the wafer placement surface of the ceramic plate. First and second resistance heating elements are embedded inside the ceramic plate. When the ceramic plate is viewed from above, the gap (first gap) between first turn-back sections which face each other in a circumferential direction, and the ga...