ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,586, issued on Oct. 14, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).
"Wafer placement table" was invented by Seiya Inoue (Handa, Japan), Tatsuya Kuno (Nagoya, Japan) and Ikuhisa Morioka (Handa, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer placement table includes: a ceramic plate having a wafer placement surface on its upper surface and incorporating an electrode; an electrically conductive plate provided on a lower surface side of the ceramic plate; an electrically conductive bonding layer that bonds the ceramic plate with the electrically conductive plate; a gas intermediate passage embedded in the electrically conductive b...