US Patent Issued to NGK INSULATORS on Nov. 4 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,463,023, issued on Nov. 4, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Tatsuya Kuno (Nagoya, Japan) and Seiya Inoue (Handa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for semiconductor manufacturing apparatus includes a ceramic plate including a horizontal and circular wafer placement surface, and a horizontal and annular focus ring placement surface provided on an outer circumference of the wafer placement surface at a position lower than the wafer placement surface by one step, and a connection part that connects the wafer placement surface and the focus ring...