ALEXANDRIA, Va., June 12 -- United States Patent no. 12,300,476, issued on May 13, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).
"Wafer placement table" was invented by Hiroshi Takebayashi (Handa, Japan) and Mitsuru Kojima (Handa, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer placement table includes a ceramic base, an electrode (FR attraction electrode), a bonding terminal (power supply terminal), and an electrode lead-out portion. The ceramic base has an upper surface serving as a wafer placement surface. The FR attraction electrode is embedded in the ceramic base. The power supply terminal is inserted into the ceramic base from a lower surface of the ceramic base and penetrates a thr...