US Patent Issued to NGK INSULATORS on June 24 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,340,990, issued on June 24, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Hiroshi Takebayashi (Handa, Japan), Tatsuya Kuno (Nagoya, Japan) and Seiya Inoue (Handa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for a semiconductor manufacturing apparatus, includes: a base substrate that has a wafer-placement-table support and a focus-ring-placement-table support; a focus-ring placement table that is joined to the focus-ring-placement-table support; a wafer placement table that is separate from the focus-ring placement table, that overlaps an inner peripheral portion ...