US Patent Issued to NGK INSULATORS on July 8 for "Ceramic material having high resistivity and high corrosion resistance, and wafer placement table" (Japanese Inventors)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,354,900, issued on July 8, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Ceramic material having high resistivity and high corrosion resistance, and wafer placement table" was invented by Akiyoshi Hattori (Nagoya, Japan), Koji Ueda (Nagoya, Japan), Hitoshi Nishio (Shizuoka, Japan) and Tomohisa Mizoguchi (Nagoya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass %."

The patent was filed on Feb. 15, 2023, under Application No. 18/169,380.

*For furt...