US Patent Issued to NGK INSULATORS on July 29 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., July 30 -- United States Patent no. 12,374,534, issued on July 29, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Mitsuru Kojima (Handa, Japan) and Hiroshi Takebayashi (Handa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for semiconductor manufacturing apparatus includes a ceramic plate incorporating an electrode; a ceramic plate through hole extending through the ceramic plate in an up-and-down direction; a base plate having electrical conductivity and located adjacent to a lower surface of the ceramic plate; a base plate through hole extending through the base plate in the up-and-down direction; an in...