US Patent Issued to NGK INSULATORS on July 1 for "Ceramic heater and method of manufacturing the same" (Japanese Inventors)

ALEXANDRIA, Va., July 3 -- United States Patent no. 12,349,241, issued on July 1, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Ceramic heater and method of manufacturing the same" was invented by Masaki Ishikawa (Handa, Japan) and Shuichiro Motoyama (Nagoya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A ceramic heater includes a ceramic plate. The ceramic plate has a wafer placement surface, and is divided into an inner-peripheral zone having a circular shape and an outer-peripheral zone having an annular shape. An inner-peripheral resistance heating element that is composed of high-melting-point metal is disposed in the inner-peripheral zone. An outer-peripheral resistance heating element ...