US Patent Issued to NGK INSULATORS on Jan. 28 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,211,729, issued on Jan. 28, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Natsuki Hirata (Nagoya, Japan), Shinya Yoshida (Nagoya, Japan), Tatsuya Kuno (Nagoya, Japan), Seiya Inoue (Handa, Japan), Taro Usami (Kakamigahara, Japan), Kenji Yonemoto (Tokoname, Japan) and Aoi Saito (Mihama-Town, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for a semiconductor manufacturing apparatus includes: a ceramic plate that has a wafer placement surface at an upper surface thereof; a plug disposition hole that extends through the ceramic plate in an up-down direction and that has ...