US Patent Issued to NGK INSULATORS on Jan. 28 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,211,726, issued on Jan. 28, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Seiya Inoue (Handa, Japan), Tatsuya Kuno (Nagoya, Japan), Natsuki Hirata (Nagoya, Japan) and Kenji Yonemoto (Tokoname, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for a semiconductor manufacturing apparatus, includes: a ceramic plate that has a ceramic plate through hole; an electroconductive base plate that has a base plate through hole and that is disposed on a lower surface side of the ceramic plate; an insulating sleeve which is inserted into the base plate through hole and of which an ...