ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,537,174, issued on Jan. 27, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).
"Wafer placement table" was invented by Masaki Ishikawa (Handa, Japan), Tatsuya Kuno (Handa, Japan) and Tomoya Ina (Nagoya, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer placement table includes a ceramic plate that has at least a wafer placement part at an upper surface thereof, a cooling plate that is joined to a lower surface of the ceramic plate and that has a refrigerant flow path, gas common paths that are provided above the refrigerant flow path, gas introduction paths that extend from a lower surface of the cooling plate to a corresponding one of the ...