US Patent Issued to NGK INSULATORS on Jan. 27 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,538,755, issued on Jan. 27, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Mitsuru Kojima (Handa, Japan), Hiroshi Takebayashi (Handa, Japan) and Jyunya Waki (Handa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for a semiconductor manufacturing apparatus, the member has a wafer placement surface and includes: a plurality of gas outflow passages each having an opening on the wafer placement surface; a common gas passage that is in communication with the plurality of gas outflow passages; and at least one gas inflow passage that is in communication with the common gas...