ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,543,247, issued on Feb. 3, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).
"Member for semiconductor manufacturing apparatus" was invented by Seiya Inoue (Handa, Japan) and Tatsuya Kuno (Nagoya, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A member for a semiconductor manufacturing apparatus includes a disk-shaped or annular ceramic heater, a metal base, an adhesive element bonding the metal base and the ceramic heater, an adhesive protective element disposed between the ceramic heater and the metal base to extend along a periphery of the adhesive element, and an anti-adhesion layer disposed between the adhesive element and the protective el...