ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,230,526, issued on Feb. 18, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).
"Electrostatic chuck heater" was invented by Tatsuya Kuno (Nagoya, Japan), Hiroshi Takebayashi (Handa, Japan) and Kenichiro Aikawa (Handa, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck heater includes an electrostatic chuck including an electrostatic electrode embedded in a ceramic sintered body, a cooling member cooling the electrostatic chuck, and a heater layer disposed between the electrostatic chuck and the cooling member and including a plurality of metal layers embedded therein in multiple stages, the metal layers including resistance he...