ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,398,465, issued on Aug. 26, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).
"Ceramic heater" was invented by Tomohiro Hara (Handa, Japan) and Yutaka Unno (Handa, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A ceramic heater includes a disk-shaped ceramic plate having a wafer placement surface on a front surface thereof, the ceramic plate having a plasma electrode and a heater electrode embedded therein in this order, from closest to the wafer placement surface to farthest, in such a manner that the plasma electrode and the heater electrode are spaced apart from each other; a cylindrical shaft that supports the ceramic plate from a back surf...