US Patent Issued to NGK INSULATORS on April 22 for "Multi-zone heater" (Japanese Inventor)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,496, issued on April 22, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Multi-zone heater" was invented by Keisuke Takashima (Toyohashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multi-zone heater capable of heating a wafer mounted on a disc-shaped ceramic substrate includes: a plurality of lift pin holes which are provided in the substrate; an inner zone heater embedded in an inner zone of the ceramic substrate; an outer zone heater embedded in an outer zone outside the inner zone; first and second feed terminals to which opposite ends of the inner zone heater are connected; first and second leads to which opposite ends of the ou...