US Patent Issued to NGK INSULATORS on April 22 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,511, issued on April 22, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Masaki Ishikawa (Handa, Japan), Tatsuya Kuno (Nagoya, Japan) and Taro Usami (Kakamigahara, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for a semiconductor manufacturing apparatus includes a ceramic plate; a composite plate joined to a lower surface of the ceramic plate; a cooling plate formed of a metal material, disposed on a lower surface of the composite plate; a first fastener that fastens the composite plate and the cooling plate; a support plate that is formed of an insulating materia...