ALEXANDRIA, Va., June 19 -- United States Patent no. 12,332,127, issued on June 17, was assigned to NextInput Inc. (Mountain View, Calif.).
"Sealed force sensor with etch stop layer" was invented by Julius Minglin Tsai (San Jose, Calif.), Ryan Diestelhorst (Sunnyvale, Calif.) and Dan Krstyen Benjamin (Marietta, Ga.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An example microelectromechanical system (MEMS) force sensor is described herein. The MEMS force sensor can include a sensor die configured to receive an applied force. The sensor die can include a first substrate and a second substrate, where a cavity is formed in the first substrate and where at least a portion of the second substrate defines a defo...