US Patent Issued to National Technology & Engineering Solutions of Sandia on Aug. 5 for "Large mass MEMS resonant beam accelerometer" (New Mexico Inventors)

ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,379,391, issued on Aug. 5, was assigned to National Technology & Engineering Solutions of Sandia LLC (Albuquerque, N.M.).

"Large mass MEMS resonant beam accelerometer" was invented by Ryan Austin Shaffer (Albuquerque, N.M.), Brian D. Homeijer (Albuquerque, N.M.) and Paul J. Resnick (Albuquerque, N.M.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A resonant beam accelerometer employing a pair of double ended tuning forks and a proof mass having meso-scale mass as it is formed in the handle layer of a SOI wafer and a method of fabricating same is disclosed. The resonant frequencies of the pair of double ended tuning forks change in opposite directions whe...