US Patent Issued to NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY on Oct. 28 for "Nitride piezoelectric body and MEMS device using same" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,454,491, issued on Oct. 28, was assigned to NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY (Tokyo).

"Nitride piezoelectric body and MEMS device using same" was invented by Sri Ayu Anggraini (Tosu, Japan), Morito Akiyama (Tosu, Japan), Masato Uehara (Tosu, Japan), Hiroshi Yamada (Tosu, Japan) and Kenji Hirata (Tosu, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provide are a nitride piezoelectric body having a value indicating a performance index (at least any one of d33, g33, and K2) higher than that of aluminum nitride not doped with any element, and a MEMS device using the same. The nitride piezoelectric body is a piezoelectri...