US Patent Issued to NATIONAL CHENG KUNG UNIVERSITY on Nov. 25 for "Virtual metrology method based on convolutional autoencoder and transfer learning and system thereof" (Taiwanese Inventors)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,481,879, issued on Nov. 25, was assigned to NATIONAL CHENG KUNG UNIVERSITY (Tainan, Taiwan).

"Virtual metrology method based on convolutional autoencoder and transfer learning and system thereof" was invented by Fan-Tien Cheng (Tainan, Taiwan), Yu-Ming Hsieh (Kaohsiung, Taiwan), Yueh-Feng Tsai (Yunlin County, Taiwan) and Chin-Yi Lin (Taipei, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A virtual metrology method based on convolutional autoencoder and transfer learning includes performing a data alignment operation, a modeling operation and a calculating operation. The data alignment operation includes performing a data-length adjusting operatio...