ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,482,665, issued on Nov. 25, was assigned to NANYA TECHNOLOGY Corp. (New Taipei, Taiwan).
"Method of manufacturing semiconductor structure" was invented by Hsuan-Wu Lai (Yilan, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of manufacturing a semiconductor structure is provided. The method includes providing a semiconductor wafer having a central region and a bevel region; forming a first material layer over the central region and the bevel region of the semiconductor wafer; performing a dry etching operation on a portion of the first material layer over the bevel region of the semiconductor wafer; performing a wet etching operation on th...