ALEXANDRIA, Va., March 26 -- United States Patent no. 12,259,658, issued on March 25, was assigned to NANYA TECHNOLOGY Corp. (New Taipei, Taiwan).
"Semiconductor device with grating structure" was invented by Chun-Yen Wei (Taipei, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present application discloses a semiconductor device with a grating structure. The semiconductor device includes a first target positioned on a first layer and including a plurality of line features spaced equally apart from each other according to a first pitch; and a second target positioned on a second layer and including a plurality of line features spaced equally apart from each other according to a second pitch. The fi...