ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,394,677, issued on Aug. 19, was assigned to NANYA TECHNOLOGY Corp. (New Taipei, Taiwan).
"Semiconductor structure with overlay mark and system for manufacturing the same" was invented by Tsai-Wei Lin (New Taipei, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a semiconductor structure, a method of manufacturing the semiconductor structure and a system for manufacturing the semiconductor structure. The method includes several operations. A substrate including a device region and a scribe line region is provided. A first layer is formed over the substrate. A first photoluminescent layer is formed over the first layer...