ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,328, issued on Oct. 21, was assigned to Nam Hun Kim (Yeoju-si, South Korea).
"Plasma source using planar helical coil" was invented by Nam Hun Kim (Yeoju-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to a plasma source using a planar helical coil, comprising: a unit coil extending from a unit-extension terminal and extending in a circular shape to a unit-extension ending terminal in one plane, wherein a plurality of unit coils are staked and comprise a connection portion that connects the unit-extension ending terminal of one unit coil and the unit-extension terminal of another unit coil."
The patent w...