US Patent Issued to MURATA MANUFACTURING on July 1 for "Pressure sensor structure, pressure sensor device, and method of manufacturing pressure sensor structure" (Japanese Inventors)

ALEXANDRIA, Va., July 3 -- United States Patent no. 12,345,593, issued on July 1, was assigned to MURATA MANUFACTURING Co. LTD. (Kyoto, Japan).

"Pressure sensor structure, pressure sensor device, and method of manufacturing pressure sensor structure" was invented by Kaoru Kishigui (Nagaokakyo, Japan) and Koichi Yoshida (Nagaokakyo, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A pressure sensor structure includes a sensor body including a diaphragm plate that functions as a sense electrode, a base electrode that faces the diaphragm plate, and a sidewall layer maintaining a gap between the diaphragm plate and the base electrode, and a conductive guard substrate to support the sensor body. The sidewall ...