ALEXANDRIA, Va., June 4 -- United States Patent no. 12,319,565, issued on June 3, was assigned to MultiDimension Technology Co. Ltd. (Zhangjiagang, China).
"MEMS environmental sensor and preparation method therefor" was invented by Insik Jin (Zhangjiagang, China), Bin Qi (Zhangjiagang, China) and Songsheng Xue (Zhangjiagang, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosed invention is a MEMS environmental sensor and preparation method thereof. A transfer cavity is produced in the middle of a transfer substrate of a MEMS environmental sensor, and a transfer medium is located inside the transfer cavity. The surface area of an input port is larger than the surface area of an output port. An e...