ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,325, issued on Oct. 21, was assigned to Multibeam Corp. (Santa Clara, Calif.).
"Charged particle beam axial calibration" was invented by Jeffery Michael Dech (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "In described examples, a method of operating a charged particle beam tool including a charged particle beam column configured to generate a charged particle beam includes capturing an under-focused image of a calibration target using the beam and capturing an over-focused image of the target using the beam. After determining an offset vector between the under-focused and over-focused images, if a magnitude of the offset vector ...