ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,521,745, issued on Jan. 13, was assigned to MKS Inc. (Andover, Mass.).
"Method and apparatus for pulse gas delivery with pressure control" was invented by Junhua Ding (Boxborough, Mass.) and Michael L'Bassi (Sterling, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Pulsed gas delivery is obtained with mass flow control using a thermal mass flow sensor and control valve. The controller is augmented for pressure control with a downstream pressure sensor. In separate control modes of operation, the control valve is controlled in response to the flow sensor during pulse gas delivery mode and controlled in response to the downstream pressure sensor duri...