US Patent Issued to MKS on Dec. 16 for "Non-invasive IED estimation for pulsed-DC and low frequency applications" (New York, Florida Inventors)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,500,066, issued on Dec. 16, was assigned to MKS Inc. (Andover, Mass.).

"Non-invasive IED estimation for pulsed-DC and low frequency applications" was invented by Linnell Martinez (Lakeland, Fla.), David Miller (Rochester, N.Y.) and Aaron Radomski (Conesus, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A RF power generation system includes a power source configured to generate a periodic waveform applied to a load and a controller configured to receive at least one of a voltage signal or a current signal indicating a respective voltage and current applied to an electrode of the load. The controller determines a surface potential of a workpiece in t...