US Patent Issued to MKS on Aug. 19 for "Methods and apparatus for reporting inlet pressure in mass flow controllers" (Massachusetts Inventor)

ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,393,209, issued on Aug. 19, was assigned to MKS Inc. (Andover, Mass.).

"Methods and apparatus for reporting inlet pressure in mass flow controllers" was invented by Junhua Ding (Boxborough, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Mass flow control (MFC) devices capable of reporting inlet pressure and methods of reporting inlet pressure are provided. A mass flow controller (MFC) includes a chamber configured to receive a fluid, an upstream valve disposed upstream of the chamber, and a downstream control valve disposed downstream of the chamber. The MFC further includes a pressure sensor that detects fluid pressure in the chamber. The MFC fur...