ALEXANDRIA, Va., June 16 -- United States Patent no. 12,306,160, issued on May 20, was assigned to MKS Instruments Inc. (Andover, Mass.).
"Binary gas purity analyzer" was invented by Chad David Wilson (Andover, Mass.), Gerardo A. Brucker (Longmont, Colo.) and Junhua Ding (Boxborough, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for detecting a composition of a binary gas mixture are provided. Such methods and systems include, with a species-dependent mass flow meter, sensing a mass flow rate of a binary gas mixture comprising gases of differing gas correction factors and, with a species-independent pressure sensor, sensing a total pressure of the binary gas mixture. An output repr...