US Patent Issued to MKS Instruments on July 15 for "Method and apparatus for pulse gas delivery with concentration measurement" (Massachusetts Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,360,093, issued on July 15, was assigned to MKS Instruments Inc. (Andover, Mass.).

"Method and apparatus for pulse gas delivery with concentration measurement" was invented by Hongke Ye (Andover, Mass.), Vidi Saptari (Andover, Mass.) and Junhua Ding (Andover, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each p...