US Patent Issued to MKS Instruments on April 29 for "Method and apparatus for mass flow control" (Massachusetts Inventor)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,287,655, issued on April 29, was assigned to MKS Instruments Inc. (Andover, Mass.).

"Method and apparatus for mass flow control" was invented by Junhua Ding (Boxborough, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Mass flow controller (MFC) devices capable of self-verification and methods of providing for self-verifying mass flow control are provided. An MFC includes a chamber configured to receive a fluid, an upstream valve disposed upstream of the chamber, and a downstream control valve disposed downstream of the chamber. The MFC further includes a pressure drop element disposed downstream of the downstream control valve and first and second p...