US Patent Issued to MKS Instruments on April 15 for "Enhanced tuning methods for mitigating RF load impedance variations due to periodic disturbances" (New York Inventors)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,278,090, issued on April 15, was assigned to MKS Instruments Inc. (Andover, Mass.).

"Enhanced tuning methods for mitigating RF load impedance variations due to periodic disturbances" was invented by Aaron Burry (Ontario, N.Y.), Peter Paul (Penfield, N.Y.) and Aaron Radomski (Conesus, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is control...