ALEXANDRIA, Va., July 30 -- United States Patent no. 12,374,573, issued on July 29, was assigned to MIRAIAL Co. LTD. (Tokyo).
"Substrate storing container" was invented by Chiaki Matsutori (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate storing container includes: a gas ejection nozzle unit having a plurality of apertures for supplying to the substrate storing space a gas that has flowed into the ventilation paths; and a gas flow rate equalizer capable of causing the gas to flow out from the plurality of apertures at an equalized flow rate. The gas flow rate equalizer includes a gas detention chamber, a pre-outflow gas retention chamber, and inter-chamber partitions defining an inter-chambe...