ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,010, issued on Oct. 7, was assigned to MILAEBO Co. LTD. (Pyeongtaek-si, South Korea).
"Apparatus for collecting by-product for semiconductor manufacturing process with improved collection space efficiency" was invented by Che Hoo Cho (Seoul, South Korea), Yeon Ju Lee (Hwaseong-si, South Korea), Ji Eun Han (Pyeongtaek-si, South Korea) and Woo Yeon Won (Pyeongtaek-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to an apparatus for collecting by-products for a semiconductor manufacturing process with improved collection space efficiency, and an object of the present disclosure is to provide an apparatus for ...