US Patent Issued to MILAEBO on Oct. 21 for "Process stop loss reduction system through rapid replacement of apparatus for trapping of reaction by-product for semiconductor process" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,368, issued on Oct. 21, was assigned to MILAEBO Co. LTD. (Pyeongtaek-si, South Korea).

"Process stop loss reduction system through rapid replacement of apparatus for trapping of reaction by-product for semiconductor process" was invented by Che Hoo Cho (Seoul, South Korea), Yeon Ju Lee (Hwaseong-si, South Korea), In Hwan Kim (Osan-si, South Korea) and Sung Won Yoon (Siheung-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a process stop loss reduction system, in which in case that pressure in a trapping apparatus and pressure in a process chamber are increased because of space clogging or the like caused by reaction by-pro...