ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,538,749, issued on Jan. 27, was assigned to MICO CERAMICS LTD. (Anseong-si, South Korea).
"Electrostatic chuck heater and manufacturing method therefor" was invented by Jin Young Choi (Anseong-si, South Korea), Jun Won Seo (Anseong-si, South Korea) and Ju Sung Lee (Anseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to an electrostatic chuck heater having a bipolar structure, the electrostatic chuck heater comprising: a heater body having an internal electrode and an external electrode for selectively performing any one of an RF grounding function and an electrostatic chuck function according to a semicon...