US Patent Issued to MiCo Ceramics on Feb. 10 for "Aluminum nitride sintered body and member for semiconductor manufacturing apparatus comprising same" (South Korean Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,550,689, issued on Feb. 10, was assigned to MiCo Ceramics Ltd. (Anseong, South Korea).

"Aluminum nitride sintered body and member for semiconductor manufacturing apparatus comprising same" was invented by Je Ho Chae (Pyeongtaek, South Korea), Hyo Sung Park (Anseong, South Korea), Duck Won Ahn (Yesan-gun, South Korea) and Tae Hee Kang (Goyang, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An aluminum nitride sintered body contains 1 to 5% by weight of yttrium oxide (Y2O3), 10 to 100 ppm by weight of titanium (Ti), and the balance being aluminum nitride (AlN). Accordingly, a volume resistance value and thermal conductivity at a high temperatu...