US Patent Issued to Materion on July 15 for "Modular sputtering target with precious metal insert and skirt" (Ohio Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,359,303, issued on July 15, was assigned to Materion Corp..

"Modular sputtering target with precious metal insert and skirt" was invented by Matthew Fisher (Mayfield Heights, Ohio), James Guerrero (Mayfield Heights, Ohio) and Chen Wang (Mayfield Heights, Ohio).

According to the abstract* released by the U.S. Patent & Trademark Office: "A sputtering target comprising a target insert comprising a target metal compound and a skirt structure including a primary skirt and a secondary skirt. The primary skirt is disposed adjacent least a portion of a secondary skirt and comprises a first metal compound. The secondary skirt comprises a second metal compound that is different from the first ...